CU7002 MEMS AND NEMS SYLLABUS FOR ME ECE 3RD SEMESTER

ANNA UNIVERSITY, CHENNAI

REGULATIONS - 2013
CU7002 MEMS AND NEMS SYLLABUS

ME 3RD SEM ELECTRONICS AND COMMUNICATION ENGINEERING SYLLABUS

CU7002 MEMS AND NEMS SYLLABUS

OBJECTIVES:

 To introducing the concepts of microelectro mechanical devices.

 To know the fabrication process of Microsystems.

 To know the design concepts of micro sensors and micro actuators.

 To introducing concepts of quantum mechanics and nano systems.

UNIT I OVERVIEW AND INTRODUCTION

New trends in Engineering and Science: Micro and Nanoscale systems Introduction to Design of MEMS and NEMS, Overview of Nano and Microelectromechanical Systems, Applications of Micro and Nanoelectromechanical systems, Microelectromechanical systems, devices and structures Definitions, Materials for MEMS: Silicon, silicon compounds, polymers, metals

UNIT II MEMS FABRICATION TECHNOLOGIES

Microsystem fabrication processes: Photolithography, Ion Implantation, Diffusion, Oxidation.Thin film depositions: LPCVD, Sputtering, Evaporation, Electroplating; Etching techniques: Dry and wet etching, electrochemical etching; Micromachining: Bulk Micromachining, Surface Micromachining, High Aspect-Ratio (LIGA and LIGA-like) Technology; Packaging: Microsystems packaging, Essential packaging technologies, Selection of packaging materials

UNIT III MICRO SENSORS

MEMS Sensors: Design of Acoustic wave sensors, resonant sensor, Vibratory gyroscope, Capacitive and Piezo Resistive Pressure sensors- engineering mechanics behind these Microsensors. Case study: Piezo-resistive pressure sensor

UNIT IV MICRO ACTUATORS

Design of Actuators: Actuation using thermal forces, Actuation using shape memory Alloys, Actuation using piezoelectric crystals, Actuation using Electrostatic forces (Parallel plate, Torsion bar, Comb drive actuators), Micromechanical Motors and pumps. Case study: Comb drive actuators

UNIT V NANOSYSTEMS AND QUANTUM MECHANICS

Atomic Structures and Quantum Mechanics, Molecular and Nanostructure Dynamics: Shrodinger Equation and Wavefunction Theory, Density Functional Theory, Nanostructures and Molecular Dynamics, Electromagnetic Fields and their quantization, Molecular Wires and Molecular Circuits

TOTAL: 45 PERIODS

REFERENCES:

1. Marc Madou, “Fundamentals of Micro fabrication”, CRC press 1997.

2. Stephen D. Senturia,” Micro system Design”, Kluwer Academic Publishers,2001

3. Tai Ran Hsu ,”MEMS and Microsystems Design and Manufacture” ,Tata McGraw Hill, 2002.

4. Chang Liu, “Foundations of MEMS”, Pearson education India limited, 2006,

5. Sergey Edward Lyshevski, “MEMS and NEMS: Systems, Devices, and Structures” CRC Press, 2002